DocumentCode

3621227

Title

AlN thin film resonators operating at 8 GHz used as sensors for organic films

Author

S. Rey-Mermet;R. Lanz;P. Muralt

Volume

2

fYear

2005

fDate

6/27/1905 12:00:00 AM

Firstpage

1253

Lastpage

1257

Keywords

"Thin film sensors","Electrodes","Polymer films","Aluminum","Acoustic waves","Impedance","Resonant frequency","Testing","Ceramics","Laboratories"

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2005 IEEE

ISSN

1051-0117

Print_ISBN

0-7803-9382-1

Type

conf

DOI

10.1109/ULTSYM.2005.1603079

Filename

1603079