• DocumentCode
    3621367
  • Title

    Effective electromechanical coupling coefficient and quality factor control by the layer arrangement of 1.8-GHhz range film bulk acoustic wave resonators composed of ZnO, SiO/sub 2/ and Al/sub 2/O/sub 3/ thin films

  • Author

    M. Takeuchi;H. Yamada;H. Kawamura;Y. Yoshino;T. Makino;S. Arai

  • Volume
    3
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1820
  • Lastpage
    1823
  • Keywords
    "Q factor","Film bulk acoustic resonators","Acoustic waves","Zinc oxide","Transistors","Biomembranes","Piezoelectric films","Impedance","Acoustic materials","Resonant frequency"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603222
  • Filename
    1603222
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621367