• DocumentCode
    3621369
  • Title

    Higher-order shear mode FBAR using polarization-inverted layers of (1120) textured zno films

  • Author

    M. Yoshinori;T. Yanagitani;M. Matsukawa;Y. Watanabe

  • Volume
    3
  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    1828
  • Lastpage
    1831
  • Keywords
    "Film bulk acoustic resonators","Zinc oxide","Piezoelectric films","Substrates","Piezoelectric polarization","Crystallization","Anodes","Frequency","Sputtering","Fabrication"
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2005 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-9382-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2005.1603224
  • Filename
    1603224
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621369