• DocumentCode
    3621564
  • Title

    Process technology advanced FEOL technology

  • Author

    K. Suguro;M. Ozturk

  • fYear
    2005
  • fDate
    6/27/1905 12:00:00 AM
  • Firstpage
    823
  • Lastpage
    823
  • Keywords
    "MOS devices","MOSFETs","FinFETs","Nitrogen","Leakage current","Gate leakage","Niobium compounds","Titanium compounds","Dielectrics","Transconductance"
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 2005. IEDM Technical Digest. IEEE International
  • Print_ISBN
    0-7803-9268-X
  • Type

    conf

  • DOI
    10.1109/IEDM.2005.1609482
  • Filename
    1609482
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3621564