• DocumentCode
    3631497
  • Title

    New generation of thermal infrared detectors

  • Author

    Z. Djuric

  • Author_Institution
    Inst. of Microelectron. Technol. & Single Crystals, Belgrade Univ., Serbia
  • Volume
    2
  • fYear
    1995
  • Firstpage
    559
  • Abstract
    Modern trends in infrared detectors lead towards large, electronically addressed two-dimensional arrays and higher operating temperatures. This would lead both to higher performance and to smaller, lighter and more affordable IR systems. Cooling requirements are the main obstacle to the more widespread use of infrared systems based on semiconductor photodetectors, particularly in the commercial applications. Recent appearance of a new generation of thermal detectors on silicon, processed by micromachining and integrated with corresponding electronic circuitry enabled an important breakthrough in infrared technology. This work considers the basic and most important types of thermal detectors, their limiting performances and the results achieved until now.
  • Keywords
    "Infrared detectors","Photodetectors","Sensor arrays","Object detection","Optical sensors","Temperature sensors","Pixel","Micromachining","Cooling","Mechanical sensors"
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 1995. Proceedings., 1995 20th International Conference on
  • Print_ISBN
    0-7803-2786-1
  • Type

    conf

  • DOI
    10.1109/ICMEL.1995.500927
  • Filename
    500927