DocumentCode
3631498
Title
Sensors in diffusion plasma processing
Author
M. Zlatanovic
Author_Institution
Fac. of Electr. Eng., Belgrade Univ., Serbia
Volume
2
fYear
1995
Firstpage
565
Abstract
Several sensors developed at the Faculty of Electrical Engineering and mounted in a 50 kVA plasma nitriding unit are described. Special attention is given to a glow-to-arc transition instability sensor and hollow cathode effect sensor used for glow discharge stabilization. Specific characteristics of temperature and Pirani gauge sensors related to application in plasma processing are discussed and one type of double thermistor flowmeter which is still under testing presented.
Keywords
"Plasma materials processing","Sensor phenomena and characterization","Plasma temperature","Plasma properties","Plasma applications","Temperature sensors","Cathodes","Glow discharges","Thermal sensors","Thermistors"
Publisher
ieee
Conference_Titel
Microelectronics, 1995. Proceedings., 1995 20th International Conference on
Print_ISBN
0-7803-2786-1
Type
conf
DOI
10.1109/ICMEL.1995.500928
Filename
500928
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