• DocumentCode
    3631502
  • Title

    Glow-to-arc transition instability sensor in processing plasma

  • Author

    M. Zlatanovic;B. Tesic;D. Nojkovic

  • Author_Institution
    Fac. of Electr. Eng., Belgrade Univ., Serbia
  • Volume
    2
  • fYear
    1995
  • Firstpage
    597
  • Abstract
    In this paper an arc quenching unit for a plasma nitriding process is described. It consists of glow-to-arc transition sensor and a parallel thyristor switching circuit.
  • Keywords
    "Plasma materials processing","Surface discharges","Switching circuits","Glow discharges","Electrodes","Frequency","Sensor phenomena and characterization","Thyristors","Stochastic processes","Cathodes"
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics, 1995. Proceedings., 1995 20th International Conference on
  • Print_ISBN
    0-7803-2786-1
  • Type

    conf

  • DOI
    10.1109/ICMEL.1995.500935
  • Filename
    500935
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3631502