• DocumentCode
    3631552
  • Title

    Novel application of quantum well intermixing implant buffer layer to enable high-density photonic integrated circuits in InP

  • Author

    Steven C. Nicholes;Milan L. Masanovic;Jonathon Barton;Erik J. Norberg;Erica Lively;Biljana Jevremovic;Larry A. Coldren;Daniel J. Blumenthal

  • Author_Institution
    Department of Materials, University of California, Santa Barbara 93106, USA
  • fYear
    2009
  • Firstpage
    215
  • Lastpage
    218
  • Abstract
    We demonstrate a novel technique for free-carrier absorption reduction using an InP buffer layer with quantum well intermixing. Application of this technique enabled fabrication of monolithic tunable optical routers with more than 200 functions.
  • Keywords
    "Implants","Buffer layers","Photonic integrated circuits","Indium phosphide","Optical waveguides","Optical wavelength conversion","Optical buffering","Optical attenuators","Optical interferometry","Fabrication"
  • Publisher
    ieee
  • Conference_Titel
    Indium Phosphide & Related Materials, 2009. IPRM ´09. IEEE International Conference on
  • ISSN
    1092-8669
  • Print_ISBN
    978-1-4244-3432-9
  • Type

    conf

  • DOI
    10.1109/ICIPRM.2009.5012486
  • Filename
    5012486
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3631552