• DocumentCode
    3634867
  • Title

    Design of a Capacitive LTCC-based Pressure Sensor

  • Author

    Darko Belavič;Marina Santo Zarnik;Cristina Marghescu;Ciprian Ionescu;Paul Svasta;Marko Hrovat;Srečko Maček;Igor Lipušček;Sandi Kocjan

  • Author_Institution
    HIPOT-RR, Trubarjeva 7, 8310 Sentjernej, Slovenia
  • fYear
    2009
  • Firstpage
    31
  • Lastpage
    36
  • Abstract
    A capacitive pressure sensor was realized by using low-temperature co-fired ceramic (LTCC) materials and technology. The paper will present the design considerations of a sensing element, and compares the experimental data to the theoretical design, with the aim to improve the sensor´s characteristics. Special points of attention are the linearity, the temperature behaviour, the pressure media and the behaviour of the reference pressure medium.
  • Keywords
    "Capacitive sensors","Ceramics","Sensor phenomena and characterization","Dielectric materials","Laminates","Crystalline materials","Sheet materials","Glass","Thermal conductivity","Electronics packaging"
  • Publisher
    ieee
  • Conference_Titel
    Design and Technology of Electronics Packages, (SIITME) 2009 15th International Symposium for
  • Print_ISBN
    978-1-4244-5132-6
  • Type

    conf

  • DOI
    10.1109/SIITME.2009.5407406
  • Filename
    5407406
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3634867