• DocumentCode
    3637449
  • Title

    Linear operation of a 11MHz CMOS-MEMS resonator

  • Author

    E Marigo;JL Munoz-Gamarra;J Giner;JL Lopez;F Torres;A Uranga;N Barniol;J Verd

  • Author_Institution
    Electronic Engineering Department, Universitat Autò
  • fYear
    2010
  • Firstpage
    158
  • Lastpage
    161
  • Abstract
    In this work, the characterization of the first lateral in-plane flexural mode DETF (Double Ended Tuning Fork) MEMS resonator integrated monolithically in a CMOS 0.35µm technology is done. This characterization is done with the same resonator stand-alone and with an integrated CMOS amplifier to obtain the handling dynamic range of the applied voltage (dc bias and ac signal) for a linear behavior of the resonator.
  • Keywords
    "Micromechanical devices","CMOS integrated circuits","Resonant frequency","Springs","Optical resonators","Softening","Phase measurement"
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium (FCS), 2010 IEEE International
  • ISSN
    1075-6787
  • Print_ISBN
    978-1-4244-6399-2
  • Type

    conf

  • DOI
    10.1109/FREQ.2010.5556351
  • Filename
    5556351
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3637449