• DocumentCode
    3639072
  • Title

    Pd-C film growN ON SiO2/Si and Si substrates

  • Author

    R. Diduszko;E. Czerwosz;E. Kowalska;M. Kozlowski;R. Nietubyć;F. Craciunoiu;M. Danila

  • Author_Institution
    Tele&
  • Volume
    2
  • fYear
    2010
  • Firstpage
    375
  • Lastpage
    378
  • Abstract
    In this paper we present results of SEM, XRD and EXAFS studies of palladium-carbon nanostructural films prepared in two-steps method on pure and oxidized silicon substrates. Structural, topographical and morphological differences were found between films deposited on those substrates.
  • Keywords
    "Films","Silicon","Palladium","Substrates","X-ray scattering","Scanning electron microscopy","Carbon"
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Conference (CAS), 2010 International
  • ISSN
    1545-827X
  • Print_ISBN
    978-1-4244-5783-0
  • Type

    conf

  • DOI
    10.1109/SMICND.2010.5649088
  • Filename
    5649088
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3639072