• DocumentCode
    3639431
  • Title

    Preparation and properties of ZnO nanomaterials for sensoric applications

  • Author

    T. Brath;D. Búc;M. Čaplovičová;L. Čaplovič;M. Predanocy;V. Hrnčiar

  • Author_Institution
    Department of Microelectronics, Slovak University of Technology in Bratislava, Slovakia
  • fYear
    2010
  • Firstpage
    61
  • Lastpage
    64
  • Abstract
    ZnO nanorods were grown on SiO2 substrates using a two-step process. In the first step, the formation of seed layers was performed. In the second step, the growth of nanorods above the seeds was carried out via three different methods. The used methods were magnetron sputtering and two types of hydrothermal methods. The obtained nanomaterial was characterized by scanning electron microscopy and X-ray diffraction. A gas sensor was then prepared using the combination of these techniques and some chosen characteristics of this sensor were measured.
  • Keywords
    "Zinc oxide","Nanomaterials","Annealing","Surface treatment","Substrates","Sputtering"
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices & Microsystems (ASDAM), 2010 8th International Conference on
  • Print_ISBN
    978-1-4244-8574-1
  • Type

    conf

  • DOI
    10.1109/ASDAM.2010.5666347
  • Filename
    5666347