DocumentCode
3639431
Title
Preparation and properties of ZnO nanomaterials for sensoric applications
Author
T. Brath;D. Búc;M. Čaplovičová;L. Čaplovič;M. Predanocy;V. Hrnčiar
Author_Institution
Department of Microelectronics, Slovak University of Technology in Bratislava, Slovakia
fYear
2010
Firstpage
61
Lastpage
64
Abstract
ZnO nanorods were grown on SiO2 substrates using a two-step process. In the first step, the formation of seed layers was performed. In the second step, the growth of nanorods above the seeds was carried out via three different methods. The used methods were magnetron sputtering and two types of hydrothermal methods. The obtained nanomaterial was characterized by scanning electron microscopy and X-ray diffraction. A gas sensor was then prepared using the combination of these techniques and some chosen characteristics of this sensor were measured.
Keywords
"Zinc oxide","Nanomaterials","Annealing","Surface treatment","Substrates","Sputtering"
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices & Microsystems (ASDAM), 2010 8th International Conference on
Print_ISBN
978-1-4244-8574-1
Type
conf
DOI
10.1109/ASDAM.2010.5666347
Filename
5666347
Link To Document