• DocumentCode
    3641434
  • Title

    Innovative research in electron microscopes, analysis of magnetic field distribution of some types of magnetic lenses by FEM

  • Author

    Regina Holčáková;Martin Marek

  • Author_Institution
  • fYear
    2011
  • fDate
    5/1/2011 12:00:00 AM
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    The paper deals with the partial results of the project specialized in innovation of research in magnetic lenses and chambers of electron microscopes. The paper is aimed at the simulation of magnetic field distribution of some types of magnetic lenses in software Ansys with the employment of results of magnetic measurements.
  • Keywords
    "Lenses","Magnetic fields","Magnetic force microscopy","Computational modeling","Scanning electron microscopy"
  • Publisher
    ieee
  • Conference_Titel
    Environment and Electrical Engineering (EEEIC), 2011 10th International Conference on
  • Print_ISBN
    978-1-4244-8779-0
  • Type

    conf

  • DOI
    10.1109/EEEIC.2011.5874578
  • Filename
    5874578