• DocumentCode
    3644961
  • Title

    Adsorption-desorption phase noise in RF MEMS/NEMS resonators

  • Author

    Ivana Jokić;Miloš Frantlović;Zoran Djurić;Miroslav Dukić

  • Author_Institution
    ICTM - Institute of Microelectronic Technologies and Single Crystals, University of Belgrade, Njegoš
  • Volume
    1
  • fYear
    2011
  • Firstpage
    114
  • Lastpage
    117
  • Abstract
    In this paper the analysis is presented of the dependence of adsorption-desorption phase noise in MEMS/NEMS resonators of their resonant frequency, operating pressure and temperature. Results of the analysis are useful for optimization of parameters and operating conditions of such components in order to fulfill the requirements of existing and future telecommunication systems.
  • Keywords
    "Micromechanical devices","Resonant frequency","Phase noise","Nanoelectromechanical systems","Radio frequency","Fluctuations"
  • Publisher
    ieee
  • Conference_Titel
    Telecommunication in Modern Satellite Cable and Broadcasting Services (TELSIKS), 2011 10th International Conference on
  • Print_ISBN
    978-1-4577-2018-5
  • Type

    conf

  • DOI
    10.1109/TELSKS.2011.6112017
  • Filename
    6112017
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3644961