• DocumentCode
    3646998
  • Title

    Modeling of the conductivity alteration in the gold thin film-based mercury sensor using the fuchs theory

  • Author

    M. Sarajlić;Z. Djurić;V. Jović

  • Author_Institution
    IHTM, Center for Microelectronic Technologies and Single Crystal, Njegoš
  • fYear
    2012
  • fDate
    5/1/2012 12:00:00 AM
  • Firstpage
    151
  • Lastpage
    153
  • Abstract
    We report on the development and testing of the metallic mercury sensor. Sensor is based on the gold thin film layer where sensing is achieved by formation of the gold-mercury amalgam. Complete technological procedure and design is performed at IHTM-CMTM in Belgrade, Serbia. We test the sensor by exposing it to the various mercury concentrations and compare results to the Langmuir adsorption theory. We explain resistivity alteration during gold-mercury adsorption by the Fuchs theory of conductivity in thin films. This is the basis for the more detailed understanding of the sensor functionality.
  • Keywords
    "Conductivity","Gold","Resists","Mercury (metals)","Films","Microelectronics","Mathematical model"
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics (MIEL), 2012 28th International Conference on
  • ISSN
    pending
  • Print_ISBN
    978-1-4673-0237-1
  • Type

    conf

  • DOI
    10.1109/MIEL.2012.6222820
  • Filename
    6222820