DocumentCode
3646998
Title
Modeling of the conductivity alteration in the gold thin film-based mercury sensor using the fuchs theory
Author
M. Sarajlić;Z. Djurić;V. Jović
Author_Institution
IHTM, Center for Microelectronic Technologies and Single Crystal, Njegoš
fYear
2012
fDate
5/1/2012 12:00:00 AM
Firstpage
151
Lastpage
153
Abstract
We report on the development and testing of the metallic mercury sensor. Sensor is based on the gold thin film layer where sensing is achieved by formation of the gold-mercury amalgam. Complete technological procedure and design is performed at IHTM-CMTM in Belgrade, Serbia. We test the sensor by exposing it to the various mercury concentrations and compare results to the Langmuir adsorption theory. We explain resistivity alteration during gold-mercury adsorption by the Fuchs theory of conductivity in thin films. This is the basis for the more detailed understanding of the sensor functionality.
Keywords
"Conductivity","Gold","Resists","Mercury (metals)","Films","Microelectronics","Mathematical model"
Publisher
ieee
Conference_Titel
Microelectronics (MIEL), 2012 28th International Conference on
ISSN
pending
Print_ISBN
978-1-4673-0237-1
Type
conf
DOI
10.1109/MIEL.2012.6222820
Filename
6222820
Link To Document