Finite Element Based Surface Roughness Study for Ohmic Contact of Microswitches

Finite element method (FEM) is used to model ohmic contact in microswitches. A determinist approach is adopted, including atomic force microscope (AFM) scanning real contact surfaces and generating rough surfaces with three-dimensional mesh. FE frictionless models are set up with the elastoplastic material and the simulations are performed with a loading-unloading cycle. Two material properties, gold and ruthenium, are studied in the simulations. The effect of roughness is investigated by comparing the models with several smoothing intensities and asperity heights. The comparison is quantitatively analyzed with relations of force vs. displacement, force vs. contact area and force vs. electrical contact resistance (ECR); further the evolution of spots in contact during a loading-unloading cycle is studied.