DocumentCode
3653734
Title
Yet another tuning fork gyroscope
Author
Roman Forke;Karla Hiller;Susann Hahn;Stefan Konietzka;Tim Motl;Daniel K?hler;Steffen Heinz;Detlef Billep;Thomas Gessner
Author_Institution
Fraunhofer ENAS, Chemnitz, Germany
fYear
2015
fDate
3/1/2015 12:00:00 AM
Firstpage
1
Lastpage
4
Abstract
This paper reports on the development of a micromechanical vibrating mass tuning fork gyroscope with coupled drive and sense modes. The mechanical structure has been designed to have a first anti-phase drive mode and a second anti-phase sense mode. The frequencies of all other modal modes are higher. The micromechanical structure is fabricated with a cavity SOI technology called BDRIE [1]. The analog ASIC for very low noise readout (<; 50 nV/rtHz) is placed on the MEMS and is connected symmetrically with wire bonds. MEMS and ASIC have been co-designed to best fit physically and electrically to each other.
Keywords
"Gyroscopes","Vibrations","Micromechanical devices","Application specific integrated circuits","Sensors","Noise","Periodic structures"
Publisher
ieee
Conference_Titel
Inertial Sensors and Systems (ISISS), 2015 IEEE International Symposium on
Type
conf
DOI
10.1109/ISISS.2015.7102359
Filename
7102359
Link To Document