• DocumentCode
    3667330
  • Title

    MEMS bimaterial IR sensor array with AC-coupled optical readout

  • Author

    Ulas Adiyan;Fehmi Civitci;Onur Ferhanoglu;Hamdi Torun;Hakan Urey

  • Author_Institution
    Koc University, Istanbul, TURKEY
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    This paper demonstrates a 35-μm pixel pitch MEMS thermal sensor array with optical-readout. We implemented an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. AC-coupled readout substantially reduced the optical noise by eliminating the large DC beam. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high dynamic range.
  • Keywords
    "Optical imaging","Optical sensors","Optical filters","Optical reflection","Optical noise","Micromechanical devices","Optical interferometry"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4673-6834-6
  • Electronic_ISBN
    2160-5041
  • Type

    conf

  • DOI
    10.1109/OMN.2015.7288834
  • Filename
    7288834
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3667330