• DocumentCode
    3667350
  • Title

    Waveguide grating based SOI MOEMS accelerometer

  • Author

    M. Balasubramanian;U. Poornalakshmi;Somya Agarwal;Prasant Kumar Pattnaik

  • Author_Institution
    Department of Electrical and Electronic Engineering, BITS-Pilani, Hyderabad Campus, India
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A simulation model of waveguide grating based SOI MOEMS accelerometer is presented. The Bragg wavelength varies linearly with external acceleration up to 5g. This design shows sensitivity of 41.75 nm/g and resolution of 0.012g.
  • Keywords
    "Accelerometers","Gratings","Optical fibers","Optical ring resonators","Acceleration"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4673-6834-6
  • Electronic_ISBN
    2160-5041
  • Type

    conf

  • DOI
    10.1109/OMN.2015.7288854
  • Filename
    7288854
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3667350