• DocumentCode
    3667379
  • Title

    Modeling of CMOS-SOI-MEMS thermal antenna for monolithic passive uncooled THz imagers

  • Author

    Alexander Svetlitza;Tanya Blank;Sara Stolyarova;Igor Brouk;Sharon Bar-Lev;Yael Nemirovsky

  • Author_Institution
    Dept. of Electrical Engineering, Technion - Israel Institute of Technology, Haifa, Israel
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We present modeling and simulations of uncooled passive THz imaging sensor based on a thermal antenna. The 2D CMOS-SOI-MEMS imager pixel array constitutes a frequency selective surface tuned to the desired wavelength band.
  • Keywords
    "Thermal sensors","Frequency selective surfaces","Absorption","Arrays","Micromechanical devices","Thermal resistance"
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS and Nanophotonics (OMN), 2015 International Conference on
  • ISSN
    2160-5033
  • Print_ISBN
    978-1-4673-6834-6
  • Electronic_ISBN
    2160-5041
  • Type

    conf

  • DOI
    10.1109/OMN.2015.7288884
  • Filename
    7288884
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3667379