• DocumentCode
    3668079
  • Title

    Nano-patterning of single- and bi-level surface-relief gratings using a commercial thermal scanning probe lithography system

  • Author

    S. Ristic;M. Nannini;P. Grutter;F. Holzner;P. Paul

  • Author_Institution
    McGill Nanotools Microfab, McGill University, Montreal, Canada
  • fYear
    2015
  • fDate
    6/1/2015 12:00:00 AM
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    The first commercial thermal scanning probe lithography tool is used for patterning of single- and bi-level surface-relief gratings. A modified tri-layer pattern transfer process is proposed to facilitate the fabrication of bi-level gratings.
  • Keywords
    "Gratings","Couplers","Probes","Nanolithography","Fiber gratings","Optical fiber couplers"
  • Publisher
    ieee
  • Conference_Titel
    Photonics North, 2015
  • Type

    conf

  • DOI
    10.1109/PN.2015.7292463
  • Filename
    7292463
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3668079