Silicon high-density capacitors for power decoupling applications

Capacitors linearity and reliability at high temperature are essential for embedded Point of Load regulation applications. RL parasitic are also becoming crucial for high frequency regulators. In that perspective, we present a silicon-integrated capacitor technology enhanced for high temperature linearity and reliability. A layout approach is proposed to optimize the capacitor RL parasitic to level equivalent to best known technologies (Multilayer Ceramic Capacitors) with better frequency stability.