• DocumentCode
    3674780
  • Title

    Gas sensors with laser-deposited active layers

  • Author

    F. Vyslouzil;V. Myslik;M. Vrnata

  • Author_Institution
    Dept. of Solid State Eng., Prague Univ., Czech Republic
  • fYear
    1998
  • Firstpage
    351
  • Lastpage
    358
  • Abstract
    This article is concerned with comparison of the properties of acetonate and oxidic layer prepared using the impulse laser ablation method, and subsequent deposition LAD. Optimal technical conditions were found for preparation of layers suitable for use as chemical sensors. The properties of the deposition layers were studied on the basis of their FTIR spectra and by measuring their electrical conductivity. Changes in the electrical conductivity were evaluated in connection with detection of a reducing atmosphere. The attaining of sensitivity of about 350 for 1000 ppm H/sub 2/ was amongst the best results obtained.
  • Keywords
    "Gas detectors","Gas lasers","Conductivity","Chemical technology","Laser ablation","Optical pulses","Chemical sensors","Atmosphere","Pulsed laser deposition","Substrates"
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Devices and Microsystems, 1998. ASDAM ´98. Second International Conference on
  • Print_ISBN
    0-7803-4909-1
  • Type

    conf

  • DOI
    10.1109/ASDAM.1998.730233
  • Filename
    730233