On-Chip Antenna Pattern Measurement Setup for 140 GHz to 220 GHz

An on-chip antenna pattern measurement setup for the frequency range between 140 GHz to 220 GHz is presented. By measuring the electrical near-field of the Antenna under test (AUT) and a subsequent near-field to far-field transformation, the radiation characteristics of the AUT can be determined. Therefore, different Open-Ended Waveguides are discussed regarding their use as near-field probe antennas. The setup is based on a commercially available wafer-prober to ensure the use of standard test equipment in circuit testing labs. To demonstrate the functionality of the setup presented, the measured radiation characteristics of an on-chip fractal bowtie antenna are presented and compared to simulations.