Permittivity extraction from on-wafer scattering parameters at microwave frequency based on electromagnetic modeling

A new and simple method for determining the permittivity of dielectric materials using electromagnetic modeling is presented in this paper. The permittivity, which is extracted from the on-wafer scattering parameters (S-parameters) of coplanar waveguides (CPWs) with different lengths fabricated in measured substrates, is estimated by comparing the propagation-constants calculated from S-parameters with the one simulated from electromagnetic modeling. Compared to the approach using general analytical calculation, these two approaches have similar accuracy at the frequency range from 1 GHz to 110 GHz for silicon substrate. However, our proposed approach is easier to be implemented.