Subwavelength prestressed microcantilevers based metamaterials for efficient manipulation of terahertz waves

We report an array of prestressed MEMS cantilever as active metamaterial for dynamic manipulation of terahertz waves. The electrostatically actuated microcantilevers integrated into split ring resonator and electrical split ring resonator unit cell, further enables active tuning of magnetic and electrical resonance, respectively. The actuation method of these bimaterial cantilevers is expanded using electrothermal and fluid flow methods. The simple MEMS microcantilevers is highly versatile with attractive electro-optic response and forms a technology platform for numerous terahertz applications in the future.