Long time stability of electrical contact base on ruthenium nanoscale films at various coating roughness

The paper contains results of researches on switching properties of contact coatings based on nanoscale ruthenium films obtained by the electrochemical deposition method. Dependences of contact resistance changes on a number of switching cycles under various thicknesses and roughness of the coating have been determined. The experiment results have determined optimal parameters of the contact coating necessary for provision of a minimal value of the MEMS-switch contact resistance in the steady mode.