• DocumentCode
    3693691
  • Title

    Studying particulate adsorption by drying droplets on a microfabricated electro-acoustic resonator

  • Author

    Abhinav Prasad;Ashwin A. Seshia;Arthur T. Zielinski;Markus Kalberer;Roderic L. Jones

  • Author_Institution
    Department of Engineering, University of Cambridge, Cambridge, United Kingdom
  • fYear
    2014
  • fDate
    6/1/2014 12:00:00 AM
  • Firstpage
    28
  • Lastpage
    31
  • Abstract
    Microfabricated in-plane bulk acoustic resonators can be configured as gravimetric sensors wherein the mass of surface-bound species is transduced as a shift in the resonant frequency. Using this principle, we examine the adsorption of spherical polystyrene latex particles on the resonator surface by drying particulate laden droplets. Distribution of particles on the surface is governed by the coffee-ring effect which is correlated to the observed frequency response of the resonators. We also present an analytical approach to describe the spatial dependence of adsorbed mass on the induced frequency shift for square plate resonators which can be extended to model other resonator geometries.
  • Keywords
    "Surface treatment","Resonant frequency","Adsorption","Sensors","Sensitivity","Silicon","Plasmas"
  • Publisher
    ieee
  • Conference_Titel
    European Frequency and Time Forum (EFTF), 2014
  • Type

    conf

  • DOI
    10.1109/EFTF.2014.7331418
  • Filename
    7331418