DocumentCode
3693691
Title
Studying particulate adsorption by drying droplets on a microfabricated electro-acoustic resonator
Author
Abhinav Prasad;Ashwin A. Seshia;Arthur T. Zielinski;Markus Kalberer;Roderic L. Jones
Author_Institution
Department of Engineering, University of Cambridge, Cambridge, United Kingdom
fYear
2014
fDate
6/1/2014 12:00:00 AM
Firstpage
28
Lastpage
31
Abstract
Microfabricated in-plane bulk acoustic resonators can be configured as gravimetric sensors wherein the mass of surface-bound species is transduced as a shift in the resonant frequency. Using this principle, we examine the adsorption of spherical polystyrene latex particles on the resonator surface by drying particulate laden droplets. Distribution of particles on the surface is governed by the coffee-ring effect which is correlated to the observed frequency response of the resonators. We also present an analytical approach to describe the spatial dependence of adsorbed mass on the induced frequency shift for square plate resonators which can be extended to model other resonator geometries.
Keywords
"Surface treatment","Resonant frequency","Adsorption","Sensors","Sensitivity","Silicon","Plasmas"
Publisher
ieee
Conference_Titel
European Frequency and Time Forum (EFTF), 2014
Type
conf
DOI
10.1109/EFTF.2014.7331418
Filename
7331418
Link To Document