Low-g sensitivity of HBAR oscillator

Vibration sensitivity is an important specification for oscillators dedicated to space or airborne systems. Vibration sensitivity can be due to from resonator, oscillator loop or non-oscillator components as wire for example. Commonly, the main source of acceleration sensitivity is due to the resonator. Active compensation can be used to decrease this effect, but such systems are not easily miniaturized. This paper presents quality factor and temperature coefficient of frequency of three different high-overtone bulk acoustic resonator and phase noise of corresponding oscillators and the first result of oscillator vibration sensitivity based on high-overtone bulk acoustic resonator. Three resonators based on different material are tested.