FDSOI to nanowires and single electron transistors

This paper reviews how the evolution of FDSOI planar architecture towards Trigate Nanowires leads to a natural Single Electron Transistor and Field Effect Transistor convergence at room temperature. On one hand, this convergence sets up technological specifications to preserve CMOS operation. On the other hand it opens the path to room temperature hybrid circuits based on single electron transistors and MOSFETs. Further on, single electron effects can be downscaled to the ultimate single atom transistors and we demonstrate the practical performance of electron pumps for metrologic applications.