• DocumentCode
    3710558
  • Title

    PDMS young´s modulus calibration for micropillar force sensor application

  • Author

    S. Johari;H. Fazmir;A.F.M. Anuar;M.Z. Zainol;V. Nock;W. Wang

  • Author_Institution
    Advanced Multi-Diciplinary MEMS-Based Integrated, NCER Centre of Excellent (AMBIENCE), School of Microelectronic Engineering, Universiti Malaysia Perlis, Malaysia
  • fYear
    2015
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    This paper reports on the calibration of PDMS Young´s Modulus device which is applied as force sensor to measure C. elegans locomotion. The Young´s Modulus of the PDMS is determined using a piezoresistive silicon force sensor. Four sets of PDMS devices are prepared using similar fabrication method, as we want to ensure that the PDMS fabrication process used in this work is capable of producing consistent material properties. From each device, three different samples are produced and tested using the sensor. The Young´s Modulus of the PDMS is determined to be 1.47 MPa. The results are also compared with Young´s Modulus values obtained in other researches. We found that the two main factors that affect the PDMS Young´s Modulus value are baking time and curing temperature, where higher and longer temperature and baking time lead to stiffer PDMS.
  • Keywords
    "Young´s modulus","Force measurement","Force","Force sensors","Curing","Structural beams","Displacement measurement"
  • Publisher
    ieee
  • Conference_Titel
    Micro and Nanoelectronics (RSM), 2015 IEEE Regional Symposium on
  • Type

    conf

  • DOI
    10.1109/RSM.2015.7354912
  • Filename
    7354912