Experimental researches of a 3-DOF parallel micromanipulator driven by linear ultrasonic motors

A 3-DOF micromanipulator driven by linear ultrasonic motors is proposed in this paper. Compared with the traditional micromanipulator based on static deformation of piezoelectric ceramics (high displacement resolution, micro-size motion range), this micromanipulator owns motion range in millimeter size (2 mm) while having high displacement resolution (50 nm). First of all, working principle of the micromanipulator is described. Parallel mechanism is adopted in this micromanipulator, linear ultrasonic motors are taken as the sliding pair to actuate the micromanipulator and flexible hinge are introduced as revolute pair. Then kinematics analysis of the micromanipulator is carried out. Finally, a series of experimental studies are illustrated in detail, steel balls and shrimp roe had been grasped and moved by this micromanipulator under telescope. The experimental results show that the micromanipulator can be applied to grab and move tiny particles. This micromanipulator has good performance and can be used in medical and biological engineering field.