Electromagnetically controlled convex micromirror for focal length variation

An electromagnetically controlled varifocal convex micromirror has been fabricated using MEMS technology. The mirror has a 5 mm × 5 mm square aperture and the planer thin reflecting metal-coated mirror surface curvature is maintained electromagnetically by means of using repulsive force of two magnets. The mirror membrane has a maximum of 18.98 micrometer displacement that ensures significantly larger back-focal length variation from 493.8 cm to 8.2 cm, using a maximum controlling current of 700 mA. This micromirror can be used in reflective optical applications where larger back-focal variation is mostly demanded.