Research on response time of thermoelectric power sensor

In this paper, the response time of different parameters is presented to study the dynamic characteristic of the thermoelectric power sensor. The fabrication of thermoelectric power sensor is compatible with GaAs monolithic microwave integrated circuit (MMIC) process and the thermopile consists of n+ GaAs and Au. The results show that the response time of thermoelectric power sensor will increase accordingly with length of thermopile, distance between resistors and thermopile, and not change obviously with the incident power.