Establishment of the Mathematic Model of the Roughness of the ECMP-Processed Micro-hole Internal Surface

In order to build the mathematic model between the roughness of the micro-hole internal surface and various influencing factors, this paper employs the response surface method for analysis and research, because the response surface method is the most frequently-used statistical method to solve multi-variable problems directly and comprehensively. Besides, it can reflect the interaction between various factors, and its analysis of the experimental data is more clear and reasonable. Box-Benhnken Design (BBD) is an experimental design plan commonly adopted by the response surface method. BBD is usually used for the analysis and evaluation of the nonlinearity between three to seven influencing factors and evaluation indexes. It can predict all the major effects and the bidirectional interaction effects. Compared with the orthogonal experiment, it features stronger randomness and complete experimental data. The relationship between the response value and the fitting factors obtained through the latter is also more reliable. Based on the above advantages, this paper adopts BBD as the experimental plan.