• DocumentCode
    3734927
  • Title

    Robotic dual-tip assembly for nanowire handling and integration

  • Author

    Malte Bartenwerfer;Sergej Fatikow

  • Author_Institution
    Division Microrobotics and Control Engineering, Department of Computing Science, University of Oldenburg, D-26129, Germany
  • fYear
    2015
  • fDate
    7/1/2015 12:00:00 AM
  • Firstpage
    1497
  • Lastpage
    1500
  • Abstract
    This paper presents the usage of a nanorobotic handling technique for the transfer of individual ZnO-nanowires with diameters of about 100nm and length of up to 10 μm. Handling and assembly are inside the SEM and use a dual-tip approach facilitating an easy controllable three-dimensional positioning of the nanowire. The actual handling sequence works without adhesive bond technique, therefore it operates with low-contaminations and is time saving in comparison to conventional approaches. The handled nanowires are integrated into electrode structures, establishing an field-effect transistor device, which is characterized in-situ.
  • Keywords
    "Robots","Electrodes","Scanning electron microscopy","Assembly","Nanoscale devices","Mechanical sensors"
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO) , 2015 IEEE 15th International Conference on
  • Type

    conf

  • DOI
    10.1109/NANO.2015.7388926
  • Filename
    7388926