DocumentCode
3734927
Title
Robotic dual-tip assembly for nanowire handling and integration
Author
Malte Bartenwerfer;Sergej Fatikow
Author_Institution
Division Microrobotics and Control Engineering, Department of Computing Science, University of Oldenburg, D-26129, Germany
fYear
2015
fDate
7/1/2015 12:00:00 AM
Firstpage
1497
Lastpage
1500
Abstract
This paper presents the usage of a nanorobotic handling technique for the transfer of individual ZnO-nanowires with diameters of about 100nm and length of up to 10 μm. Handling and assembly are inside the SEM and use a dual-tip approach facilitating an easy controllable three-dimensional positioning of the nanowire. The actual handling sequence works without adhesive bond technique, therefore it operates with low-contaminations and is time saving in comparison to conventional approaches. The handled nanowires are integrated into electrode structures, establishing an field-effect transistor device, which is characterized in-situ.
Keywords
"Robots","Electrodes","Scanning electron microscopy","Assembly","Nanoscale devices","Mechanical sensors"
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO) , 2015 IEEE 15th International Conference on
Type
conf
DOI
10.1109/NANO.2015.7388926
Filename
7388926
Link To Document