DocumentCode
3763342
Title
White light triangulation sensor for flexible inspection system
Author
Abraham Mario Tapilouw;Yi-Wei Chang;Hsiao-Wei Liu;Hau-Wei Wang;Hung-Ming Tai
Author_Institution
Center for Measurement Standards, Industrial Technology Research Institute, Hsinchu City, Taiwan
fYear
2015
Firstpage
765
Lastpage
768
Abstract
A triangulation sensor containing two light sources with different wavelength and individual slit has been developed. Differential technique is applied to improve spatial resolution as performing height reconstruction of a specimen. The system can measure up to 7 mm with accuracy up to 1.144 um. Robotic arm with multiple degrees of freedom can be employed as the motion platform to increase flexibility of inspection.
Keywords
"Robot sensing systems","Coordinate measuring machines","Light sources","Pistons","Position measurement","Cameras"
Publisher
ieee
Conference_Titel
Sensing Technology (ICST), 2015 9th International Conference on
Electronic_ISBN
2156-8073
Type
conf
DOI
10.1109/ICSensT.2015.7438499
Filename
7438499
Link To Document