DocumentCode
376717
Title
Modeling of widely tunable micromachined surface emitting laser with warped cantilever
Author
Amano, T. ; Koyama, F. ; Iga, K.
Author_Institution
Microsyst. Res. Center, Tokyo Inst. of Technol., Yokohama, Japan
Volume
2
fYear
2001
fDate
15-19 July 2001
Abstract
We propose a widely tunable micromachined surface emitting laser with a strain control layer. We present the possibility of a wide continuous wavelength tuning range of over 70 nm by warping the cantilever to widen the air gap.
Keywords
distributed Bragg reflector lasers; laser tuning; micro-optics; micromachining; semiconductor lasers; strain control; surface emitting lasers; Ga/sub 0.2/Al/sub 0.8/As-GaAs; GaAlAs/GaAs DBRs; VCSEL; air gap widening; electrostatic force tuning; enhanced tuning range; modeling; strain control layer; warped cantilever; wide continuous wavelength tuning range; widely tunable micromachined surface emitting laser; Distributed Bragg reflectors; Gallium arsenide; Laser modes; Laser tuning; Lattices; Semiconductor lasers; Strain control; Surface emitting lasers; Tunable circuits and devices; Vertical cavity surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location
Chiba, Japan
Print_ISBN
0-7803-6738-3
Type
conf
DOI
10.1109/CLEOPR.2001.971105
Filename
971105
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