Numerical analysis on RHEED patterns based on gray level: A case study of IBAD-MgO film

Biaxially texture magnesium oxide (MgO) films have been grown using ion beam assisted deposition (IBAD). IBAD-MgO films can easily to grow in the preferred direction and to form biaxial texture fast by the effect of ion beam assisted current, where the ability of preferred growth is directly controlled by the ion beam assisted current. An in situ reflection high energy electron diffraction (RHEED) has often been used to monitor the texture development of MgO film during the IBAD process. Here, we developed novel numerical analysis methods for RHEED patterns based on gray level. We constructed corresponding gray scale images and binary images from RHEED patterns. The area and brightness of selected diffraction spots, such as (004) diffraction spots, were measured based on the gray scale images. Further, rich information on the whole RHEED binary images, such as high-brightness pixels proportion of gray value higher than 50% gray level, can be obtained. Results from these qualitative analyses of RHEED patterns were coincided to the texture evolution obtained by phi scan rocking curves. This indicates these kinds of analysis methods based on gray level are effective for RHEED patterns.