• DocumentCode
    3770612
  • Title

    Plasma polymerization: A new process for electronics

  • Author

    R. K. Sadhir;H. E. Saunders

  • Author_Institution
    Westinghouse R&
  • fYear
    1985
  • Firstpage
    282
  • Lastpage
    287
  • Abstract
    Plasma polymerization or glow discharge polymerization is a technique for producing unique, pinhole free, thin polymeric films. The monomers that can be used in this technique need not have a formally polymerizable structure: hence they cannot be polymerized by other, more conventional techniques. In this paper, we will review the process and mechanism of plasma polymerization, as well as discuss applications for such films in the areas of protective coatings for microcircuitry, and anti-reflective coatings for photo-voltaic solar cells.
  • Keywords
    "Polymers","Films","Plasmas","Inductors","Coatings","Substrates","Permeability"
  • Publisher
    ieee
  • Conference_Titel
    Electrical/Electronics Insulation Conference, 1985 EIC 17th
  • Print_ISBN
    978-1-5090-3115-3
  • Type

    conf

  • DOI
    10.1109/EIC.1985.7458625
  • Filename
    7458625