• DocumentCode
    3770932
  • Title

    Extended titanium nitride gate field-effect transistor with PVC selective membrane for hydrogen and potassium ion detection

  • Author

    Hau-Cheng Wang; Tsung-Cheng Chen; Hao Yang; Pi-Chun Juan; Chia-Ming Yang; Chao-Sung Lai

  • Author_Institution
    Department of Electronic Engineering, Chang Gung University, Taoyuan, Taiwan, 333
  • fYear
    2014
  • fDate
    7/1/2014 12:00:00 AM
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    A 50 nm-thick TiN sensing membrane with nitrogen (N2) ratio modification was firstly used in EGFET for pH sensing. The highest pH sensitivity of 61 mV/pH with linearity of 99.9% could be found in N2 to N2+Ar ratio of 20%. Similar performance could be maintained at least for 250 days. With additional PVC selective membrane of K+ ionophore, sensitivity could be increased to 48.7mV/pK. This developed TiN EGFET could be a potential candidate for pH and pK sensing application.
  • Keywords
    "Tin","Sensors","Sensitivity","Linearity","Biomembranes","Current measurement","Voltage measurement"
  • Publisher
    ieee
  • Conference_Titel
    Nanoelectronics Conference (INEC), 2014 IEEE International
  • Electronic_ISBN
    2159-3531
  • Type

    conf

  • DOI
    10.1109/INEC.2014.7460458
  • Filename
    7460458
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3770932