Development of platform for micro-positioning actuated by piezo-legs

A platform for micro-positioning, actuated by three piezo legs, is described. The legs have no joints and motion is performed by slow bending and quick stretching of the legs. During the quick stretching phase the leg tips slip over the ground surface and the platform moves for a small increment. Repetition of this procedure results in a continuous motion. Although the platform design is very simple, it is possible to achieve various motion speeds, very precise positioning and either translatory or complex planar motion. The prototype has been constructed and tested.