The characterization of laser-deposited thin sensitive layers of gas sensors

The aim of this work is to investigate the properties of gas sensors with active layers prepared by pulsed laser deposition (PLD) technology. The active layers were deposited on planar sensor chips with interdigital platinum electrodes. The deposition was carried out from tin dioxide (SnO/sub 2/), indium sesquioxide (In/sub 2/O/sub 3/), tin acetylacetonate (SnAcAc) and indium acetylacetonate (InAcAc)-based targets by KrF excimer laser. Our interest was focused on the following problems: detection of hydrogen and ozone, the changes of maximal sensitivity S/sub max/ and the temperature of maximal sensitivity T/sub max/ as a result of using dopants and catalyst, low-temperature of maximal sensitivity T/sub max/ as a result of using dopants and catalyst, low-temperature (about 100/spl deg/C) sensitivities and ac-measurements of sensors (real and imaginary part of complex impedance for different frequencies).