• DocumentCode
    3783430
  • Title

    Glass technology for MMIC

  • Author

    W. Jablonski;J. Szczesny

  • Author_Institution
    Inst. of Electron Technol., Warsaw, Poland
  • Volume
    1
  • fYear
    2000
  • Firstpage
    132
  • Abstract
    A new approach to the design of microwave monolithic integrated circuits (MMIC) is presented in this paper. The technology uses thick glass layers on the silicon in order to reduce parasitic capacitance introduced by metallic layers deposited on the dielectric layer of the MMIC. It was applied to construct a microwave monolithic switch with a single input and three outputs.
  • Keywords
    "Glass","Silicon","Switches","Etching","Microwave technology","Integrated circuit technology","Monolithic integrated circuits","Parasitic capacitance","Dielectrics","MMICs"
  • Publisher
    ieee
  • Conference_Titel
    Microwaves, Radar and Wireless Communications. 2000. MIKON-2000. 13th International Conference on
  • Print_ISBN
    83-906662-3-5
  • Type

    conf

  • DOI
    10.1109/MIKON.2000.913891
  • Filename
    913891
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3783430