• DocumentCode
    3784115
  • Title

    Micromechanical coplanar waveguide compatible with pseudomorphic AlGaAs/InGaAs/GaAs based HFETs

  • Author

    M. Tomaska;T. Lalinsky;M. Krnac;M. Klasovity;Z. Mozolovad;S. Hascik;I. Kostic

  • Author_Institution
    Fac. of Electr. Eng., Slovak Tech. Univ., Bratislava, Slovakia
  • fYear
    2001
  • fDate
    6/23/1905 12:00:00 AM
  • Firstpage
    211
  • Lastpage
    216
  • Abstract
    The design, fabrication and characterization of microwave transmission structure on thin composite semiconductor/dielectric substrate technologically compatible with pseudomorphic HFETs for a micromechanical microwave transmitted power sensor are discussed.
  • Keywords
    "Micromechanical devices","Coplanar waveguides","Semiconductor waveguides","Fabrication","Dielectric substrates","Microwave technology","HEMTs","MODFETs","Sensor phenomena and characterization","Microwave sensors"
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices for Microwave and Optoelectronic Applications, 2001 International Symposium on
  • Print_ISBN
    0-7803-7049-X
  • Type

    conf

  • DOI
    10.1109/EDMO.2001.974309
  • Filename
    974309
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3784115