• DocumentCode
    3784162
  • Title

    Microelectromechanical systems: a new technology for biomedical applications

  • Author

    M.R. Neurnan;R.B. Fair;M. Mehregany;H.Z. Massoud

  • Author_Institution
    Case Western Reserve University
  • fYear
    1993
  • fDate
    6/15/1905 12:00:00 AM
  • Firstpage
    1545
  • Lastpage
    1546
  • Keywords
    "Microelectromechanical systems","Microelectronics","Microelectromechanical devices","Micromechanical devices","Etching","Silicon","Fabrication","Integrated circuit technology","Micromachining","Biomedical electrodes"
  • Publisher
    ieee
  • Conference_Titel
    Engineering in Medicine and Biology Society, 1993. Proceedings of the 15th Annual International Conference of the IEEE
  • Print_ISBN
    0-7803-1377-1
  • Type

    conf

  • DOI
    10.1109/IEMBS.1993.979274
  • Filename
    979274
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3784162