DocumentCode
378879
Title
Microelectromechanical scanning devices for optical networking applications
Author
Wu, M.C. ; Dooyoung Hah ; Patterson, P.R. ; Toshiyoshi, H.
Author_Institution
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Volume
1
fYear
2002
fDate
7-7 Feb. 2002
Firstpage
358
Abstract
The state-of-the-art of optical MEMS devices for optical networking applications is reviewed, and a scanning micromirror with angular vertical comb (AVC) actuators is introduced. The AVC scanner uses a single etching process and is completely self-aligned. It has 50% larger scan angle than conventional vertical comb devices. Resonant frequency is 630 Hz.
Keywords
micro-optics; microactuators; mirrors; optical scanners; optical switches; photonic switching systems; 2-axis scanning micromirrors; 630 Hz; MEMS optical switches; MEMS scanning devices; MOEMS; angular vertical comb actuators; microelectromechanical scanning devices; optical MEMS device; optical networking applications; Actuators; Automatic voltage control; Fingers; Micromechanical devices; Micromirrors; Optical crosstalk; Optical devices; Optical fiber networks; Optical fiber polarization; Optical switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 2002. Digest of Technical Papers. ISSCC. 2002 IEEE International
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-7803-7335-9
Type
conf
DOI
10.1109/ISSCC.2002.993080
Filename
993080
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