DocumentCode
381817
Title
Commercialization of harsh environment microsystems - existing challenges
Author
Merrill, Walter
Author_Institution
Glennan Microsystems Initiative, Cleveland, OH, USA
Volume
2
fYear
2002
fDate
2002
Firstpage
1105
Abstract
This paper describes the existing challenges being experienced by the Glennan Microsystems Initiative in its goal to commercialize microsystems technology for application in harsh environments. The Glennan Microsystems Initiative develops, applies and commercializes microsystems technology for harsh environments. This Initiative integrates and augments substantial microsystems resources that currently exist, focuses them on areas of industrial importance and bridges key, critical gaps to commercialization through strategic investments. This paper describes the project, including the market drivers and opportunities and particularly our focus on silicon carbide based microsystem devices. The objectives of the Initiative will be described as well as the approach to achieve the objectives and metrics to measure progress. These objectives include both a technology development objective and a commercialization objective. Some current technology results will be presented as well as a plan for future activities.
Keywords
micromechanical devices; semiconductor technology; silicon compounds; wide band gap semiconductors; Glennan Microsystems Initiative; SiC; commercialization; harsh environment microsystems; microsystems resources; strategic investments; technology development; Bridges; Chemical sensors; Commercialization; Government; Manufacturing industries; Microsensors; NASA; Research and development; Silicon carbide; Space technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2002. Proceedings of IEEE
Print_ISBN
0-7803-7454-1
Type
conf
DOI
10.1109/ICSENS.2002.1037268
Filename
1037268
Link To Document