• DocumentCode
    381817
  • Title

    Commercialization of harsh environment microsystems - existing challenges

  • Author

    Merrill, Walter

  • Author_Institution
    Glennan Microsystems Initiative, Cleveland, OH, USA
  • Volume
    2
  • fYear
    2002
  • fDate
    2002
  • Firstpage
    1105
  • Abstract
    This paper describes the existing challenges being experienced by the Glennan Microsystems Initiative in its goal to commercialize microsystems technology for application in harsh environments. The Glennan Microsystems Initiative develops, applies and commercializes microsystems technology for harsh environments. This Initiative integrates and augments substantial microsystems resources that currently exist, focuses them on areas of industrial importance and bridges key, critical gaps to commercialization through strategic investments. This paper describes the project, including the market drivers and opportunities and particularly our focus on silicon carbide based microsystem devices. The objectives of the Initiative will be described as well as the approach to achieve the objectives and metrics to measure progress. These objectives include both a technology development objective and a commercialization objective. Some current technology results will be presented as well as a plan for future activities.
  • Keywords
    micromechanical devices; semiconductor technology; silicon compounds; wide band gap semiconductors; Glennan Microsystems Initiative; SiC; commercialization; harsh environment microsystems; microsystems resources; strategic investments; technology development; Bridges; Chemical sensors; Commercialization; Government; Manufacturing industries; Microsensors; NASA; Research and development; Silicon carbide; Space technology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Sensors, 2002. Proceedings of IEEE
  • Print_ISBN
    0-7803-7454-1
  • Type

    conf

  • DOI
    10.1109/ICSENS.2002.1037268
  • Filename
    1037268