Micro-electromechanical systems and test results of SiC MEMS for high-g launch applications

Micro-electromechanical systems or MEMS are typically used for the measurement of physical phenomena associated with gun launched projectiles and other smart munitions. These devices generally experience not only the harsh environment encountered during initial shock and vibration at gun launch, but also the extremes of high temperature, high pressure and in some cases large electromagnetic fields associated with the launching mechanisms. This paper describes the various types of sensor requirements and characteristics for modern smart weapons, especially those of MEMS and in particular recent experimental results with silicon carbide MEMS pressure sensors.