A sensorized μelectro discharge machined superelastic alloy microgripper for micromanipulation: simulation and characterization

Author

Menciassi, A. ; Eisinberg, A. ; Mazzoni, M. ; Dario, P.

Author_Institution

Scuola Superiore Sant´´Anna, CRIM, Pisa, Italy

Volume

2

fYear

2002

fDate

2002

Firstpage

1591

Abstract

This paper describes a novel microgripper, fabricated in a superelastic alloy (Ni_50.8Ti_49.2) by wired micro Electro Discharge Machining (μEDM). The main features of the new microgripper are the use of a superelastic alloy to improve flexure performance by lowering stresses induced and the μEDM fabrication technique. The microgripper was sensorized with commercial semiconductor strain-gauges and implemented in a force-feedback micromanipulation workstation developed in the authors´ laboratory. Both FEM simulations and the results of experimental characterization in position and force are presented.

Keywords

electrical discharge machining; finite element analysis; force feedback; micromachining; micromanipulators; nickel alloys; strain gauges; titanium alloys; FEM simulations; Ni-Ti; Ni-Ti superelastic alloy microgripper; flexure performance; force-feedback micromanipulation workstation; micro object manipulation; micromanipulation; semiconductor strain-gauges; stress reduction; wired micro EDM; wired micro electro discharge machining; Fabrication; Force sensors; Grippers; Joining materials; Microstructure; Nickel; Optical design; Optical materials; Steel; Stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Robots and Systems, 2002. IEEE/RSJ International Conference on

Print_ISBN

0-7803-7398-7

Type

conf

DOI

10.1109/IRDS.2002.1043982

Filename

1043982